Products & Services

Equipment Foundation

Floor Enhancement

No stiffness requirement. The total weight of a machine is under 5 tons or maximum weight of each pedestal is under 1000kg.

高架地板开孔开孔后强度遭受破坏，必须在高架地板下做钢构补强

强固隔震型

对于微震动较敏感；或是设备的操作环境有微震需求；或是须与生产人员行经动线之高架地板隔离

主要适用设备:检验设备(INSPECTION)、光学显微镜(Microscopes)、REPAIR、RUBBING、COATER、OVEN等制程设备

微震等级：VC-A至VC-B

Heavy loading Type

设备重量承载超过设置区域的地板承重能力；设备作动时瞬间产生较大作用力需以承重力量较佳的基座来承载

主要适用设备：SPUTTER、CVD、PVD 等制程设备

Concrete Anti-Vibration Type

其操作环境对微震需求较为严苛或设备设置位置微振背景值较差者，以水泥基座来达到最佳的隔震效果

主要适用设备：CD-SEM等制程设备

Anti-Vibration Type 2

设备本体会产生动能且操作环境对微震与刚性需求需求严苛，或是对于物理量-位移极为敏感的机台，或设备设置位置微振背景值较差者，以高钢性基座来达到最佳的隔震效果

主要适用设备：EXPOSURE(曝光机)、AOI、SURFACE PROFILER等制程设备

Other FAB Engineering & Products

Equipment Seismic Isolation & Vibration Reduction
Active Vibration Isolation System、Equipment Seismic Isolation、Equipment Vibration Reduction Solution
Foundation Installation、Moving and Removing
Foundation or equipment installation、moving and removing
Specilized Equipments for Clean Room
Trolley、Wire Shelf、Computer Rack、Cabinet、Aluminum Alloy Products
FAB Related Engineering
Custimized Steel Products (Trolley Wire Shelf, Computer Rack, Cabinet, N2 Cabinet)、Piping Tary Support Engineering、Catwalk Engineering、Maintenance Platform Engineering、Aluminum Alloy Products
Clear Room Related Engineering
Clean Engineering (Mini-Environment、Enclosure、Cover、Partition)、Raised Floor Cutting and Installation
CNC Precision machinery
Cassette Transfer、Clear View Panel、 Floor Valve、Wall Valve、Bender、Other Machined Parts

Equipment Foundation Type

[table id=32/]

[table id=33/]

[table id=34/]

[table id=35/]

[table id=36/]