Products & Services

Equipment Foundation

Floor Enhancement

No stiffness requirement. The total weight of a machine is under 5 tons or maximum weight of each pedestal is under 1000kg.

高架地板开孔开孔后强度遭受破坏,必须在高架地板下做钢构补强

强固隔震型

对于微震动较敏感;或是设备的操作环境有微震需求;或是须与生产人员行经动线之高架地板隔离

主要适用设备:检验设备(INSPECTION)、光学显微镜(Microscopes)、REPAIR、RUBBING、COATER、OVEN等制程设备

微震等级:VC-A至VC-B

Heavy loading Type

设备重量承载超过设置区域的地板承重能力;设备作动时瞬间产生较大作用力需以承重力量较佳的基座来承载

主要适用设备:SPUTTER、CVD、PVD 等制程设备

Concrete Anti-Vibration Type

其操作环境对微震需求较为严苛或设备设置位置微振背景值较差者,以水泥基座来达到最佳的隔震效果

主要适用设备:CD-SEM等制程设备

Anti-Vibration Type 2

设备本体会产生动能且操作环境对微震与刚性需求需求严苛,或是对于物理量-位移极为敏感的机台,或设备设置位置微振背景值较差者,以高钢性基座来达到最佳的隔震效果

主要适用设备:EXPOSURE(曝光机)、AOI、SURFACE PROFILER等制程设备

Other FAB Engineering & Products

  • Equipment Seismic Isolation & Vibration Reduction
    Active Vibration Isolation System、Equipment Seismic Isolation、Equipment Vibration Reduction Solution
  • Foundation Installation、Moving and Removing
    Foundation or equipment installation、moving and removing
  • Specilized Equipments for Clean Room
    Trolley、Wire Shelf、Computer Rack、Cabinet、Aluminum Alloy Products
  • FAB Related Engineering
    Custimized Steel Products (Trolley Wire Shelf, Computer Rack, Cabinet, N2 Cabinet)、Piping Tary Support Engineering、Catwalk Engineering、Maintenance Platform Engineering、Aluminum Alloy Products
  • Clear Room Related Engineering
    Clean Engineering (Mini-Environment、Enclosure、Cover、Partition)、Raised Floor Cutting and Installation
  • CNC Precision machinery
    Cassette Transfer、Clear View Panel、 Floor Valve、Wall Valve、Bender、Other Machined Parts

Equipment Foundation Type

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