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SPECIALIZED MANUFACTURER EQUIPMENT FOUNDATION 1 Equipment Foundation INTENSIFY THE STRUCTURE 1 Floor Enhancement No stiffness requirement. The total weight of a machine is under 5 tons or maximum weight of each pedestal is under 1000kg. 高架地板开孔开孔后强度遭受破坏，必须在高架地板下做钢构补强 FREE WEIGHTS 1 强固隔震型 对于微震动较敏感；或是设备的操作环境有微震需求；或是须与生产人员行经动线之高架地板隔离 主要适用设备:检验设备(INSPECTION)、光学显微镜(Microscopes)、REPAIR、RUBBING、COATER、OVEN等制程设备 微震等级：VC-A至VC-B HEAVY LOADING 1 Heavy loading Type 设备重量承载超过设置区域的地板承重能力；设备作动时瞬间产生较大作用力需以承重力量较佳的基座来承载 主要适用设备：SPUTTER、CVD、PVD 等制程设备 CONCRETE TYPE 1...